Semi Conductor

Semiconductor Equipment Offerings 

Strong background in all aspects of cleanroom class semiconductor equipment including mainframe and system design, factory interfaces, vacuum and atmospheric wafer handling, system and embedded software, vacuum and atmospheric process chamber design, test chamber design, inspection and test equipment, environment control & auxiliary systems including dewpoint control, particle count testing, CDA, Inert Gas, DI Water,  and ESP.

Vacuum Equipment Design :
Transfer chamber design, load lock, vacuum and atmospheric wafer handlers, vacuum system design, pneumatics design, heating systems.


Atmospheric Equipment Design :
Track design, vacuum and atmospheric wafer handlers, pneumatics design, heating systems, fluid handling design


Control System And Software :
TCPIP, RS232, Canopen, Ethercat, Modbus and other field buses, SECS/GEM, board level protocols, multi-axis motion control, PLC & SCADA Programming and retrofits, custom HMI development, EX and Hazardous Zones automation
Electrical System And Power Distribution Design And Panels :
Power and signal distribution, High voltage, Design for safety, LOTO, Harnessing, EMI/EMC compliance


Process Chamber Design :

Vacuum chamber and system design including chamber mechanism, materials, pumping system design, chamber body and lift, and pneumatics.

Wet chamber design including chamber mechanisms, materials, chemical handling, fluid delivery, and pneumatics.


Metrology, Alignment, Test :

Metrology equipment design and integration.

Vision and sensor based high accuracy alignment chambers and systems using high resolution stages, cameras and sensors.

Vision and sensor-based inspection chambers, fixtures and systems.

Test fixtures, modules and chambers.